EL-FLOW® Select Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a 'laboratory style' pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows from:
lowest range 0,014...0,7 mln/min up to highest range 8...1670 ln/min
- High accuracy (standard 0,5% Rd plus 0,1% FS)
- Rangeability in digital mode up to 1:187,5
- Fast response (down to 500 msec), excellent repeatability
- Optional Multi-Gas/Multi-Range functionality: freely programmable ranges and gas types
- Pressure ratings 64/100 bar (Multi-Gas/Multi-Range functionality up to 10 bar)
- High pressure versionsavailable
- Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
- Electro-chemical polishing of all surfaces
- Compact, modular construction
- Metal sealed and/or down-ported versions available
- Analytical/environmental equipment
- Gas flow monitoring in food, chemical and petrochemical industries
- Gas consumption measurement in gas distribution systems for internal accounting purposes
- Detection of gas leakage through objects
- Semiconductor manufacturing
- Surface treatment installations