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EL-Flow® Metal Sealed Mass Flow and Pressure Meters/Controllers, designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. Metal sealed Mass Flow Meters/Controllers can be supplied in ranges starting from 0.1…5 sccm up to 1…50 slm (based on N2) or even higher on request. Metal sealed Pressure Meters/Controllers are available in pressure ranges from 0.029…1.43 psi up to 18…900 psi.
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  • patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
  • electropolished wetted parts
  • fast response, excellent repeatability
  • flow ranges from 0.1…5 sccm up to 1…50 slm N2-equivalent (higher on request)
  • Multi Gas / Multi Range functionality
  • optional solutions for low pressure drop or vacuum applications
  • pressure ranges from 0.029…1.43 up to 18…900 psi
  • optional surface mount constructions
  • compliant with RoHS directives

Both Mass Flow Meters / Controllers and Pressure Meters / Controllers are applied across a huge range of applications e.g. in the fabrication of gas compositions, for CVD and PVD, optical glass coatings, LED production, in vacuum technology and solar power (Photo-Voltaic) element manufacturing and also in semiconductor processes such as ion implantation, etching processes and atomic layer deposition (ALD). Depending on the chemical properties of the process gases and the level of particle cleanliness required, equipment builders often prefer to apply metal sealed equipment over those with elastomeric seals. Bronkhorst High-Tech has many years of experience, supplying precise and reliable instruments for demanding high-purity applications, distinguishing themselves by unique metal-to-metal seals with excellent resealing capability.

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