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The FLOW-SMS series on a compact, lightweight but still rugged mounting rail system one or more mass flow or pressure sensor modules can be combined with control valves, shut-off valves, mixing chambers, filters or any other functional module as per customer's request. The ranges for the flow sensor can be selected between approx. 5 mln/min up to 50 ln/min or even higher. Depending on the application.
- Compact assembly ensures space efficiency and minimized dead volume
- Economical solution, low cost of ownership
- Tubeless construction reduces potential leak points
- Service friendly; easily accessible from the top
- Great flexibility regarding system extension or modification
- Pre-tested “Plug and Work” units, reducing custom testing requirements
The FLOW-SMS Series has great potential in many different markets, for instance in:
- Vacuum, plasma, sputter and coating processes
- Catalytical test benches
- Semiconductor and solar cell fabrication
- Burner control (welding)
- Biotechnological and chemical installations
- Food and beverage processes
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